Improved cantilever profiles for sensor elements

被引：28

作者：

Fernando, Sanchitha ^{[1
]}

Austin, Michael ^{[1
]}

Chaffey, Jason ^{[2
]}

机构：

[1] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic 3001, Australia

[2] Mems ID, Mini FAB, Scoresby, Vic 3179, Australia

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2007年 / 40卷 / 24期

关键词：

D O I：

10.1088/0022-3727/40/24/009

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The problem of simultaneously enhancing sensitivity and noise immunity of microcantilevers is investigated. The dependence of deflection and resonant frequency of a microcantilever on its dimensions is studied. A principle to increase deflection and resonant frequency simultaneously is established. Several cantilevers agreeing with this principle are investigated using analytical models and are compared with FEM simulations. Using these results, a cantilever profile that achieves a larger deflection and a larger resonant frequency compared with uniform cantilevers is proposed to be used in sensor elements.

引用

页码：7652 / 7655

页数：4

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