Measurement of high-departure aspheres using subaperture stitching with the Variable Optical Null (VON™)

被引:17
作者
Kulawiec, Andrew [1 ]
Murphy, Paul [1 ]
DeMarco, Michael [1 ]
机构
[1] QED Technol, Rochester, NY 14607 USA
来源
5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES | 2010年 / 7655卷
关键词
Interferometry; subaperture stitching; metrology; variable optical null; VON; asphere; SSI (R); ASI;
D O I
10.1117/12.864962
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Aspheric surfaces are proven to provide significant benefits to a wide variety of optical systems, but the ability to produce high-precision aspheric surfaces has historically been limited by the ability (or lack thereof) to measure them. Traditionally, aspheric measurements have required dedicated null optics, but the cost, lead time, and calibration difficulty of using null optics has made the use of aspheres more challenging and less attractive. In the past three years, QED has developed the Subaperture Stitching Interferometer for Aspheres (SSI-A (R)) to help address this limitation, providing flexible aspheric measurement capability of up to 200 waves of aspheric departure from best-fit sphere. Some aspheres, however, have thousands of waves of departure. We have recently developed Variable Optical Null (VON) technology that can null much of the aspheric departure in a subaperture. The VON is automatically configurable and is adjusted to nearly null each specific subaperture of an asphere. This ability to nearly null a local subaperture of an asphere provides a significant boost in aspheric measurement capability, enabling aspheres with up to 1000 waves of departure to be measured, without the use of dedicated null optics. We outline the basic principles of subaperture stitching and VON technology, demonstrate the extended capability provided by the VON, and present measurement results from the new Aspheric Stitching Interferometer (ASI (R)).
引用
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页数:4
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