Erosion Mechanism of Ultrasonic Vibration Abrasive Waterjet in Micro Machining

被引：5
|
作者：
Zhu, Hongtao [1 ]
Huang, Chuanzhen [1 ]
Wang, Jun [2 ]
Liu, Zengwen [1 ]
Zhang, Shuguang [1 ]
机构：
[1] Shandong Univ, Sch Mech Engn, Key Lab High Efficiency & Clean Mech Manufacture, Minist Educ,CaJET, Jinan 250061, Peoples R China
[2] Univ New South Wales, Sch Mech & Mfg Engn, Sydney, NSW 2052, Australia
来源：
ADVANCES IN MATERIALS PROCESSING IX | 2010年 / 443卷
关键词：
Abrasive Waterjet; Ultrasonic Vibration; Erosion Mechanism; Micro Machining; DISPLACEMENT-FIELDS; BRITTLE MATERIALS; DRILLING PROCESS; CERAMICS;
D O I：
10.4028/www.scientific.net/KEM.443.675
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, a study on erosion mechanism of Ultrasonic Vibration Abrasive Waterjet is presented. Theoretical analysis of the total effective erosion kinetic energy of UVAWJ is performed. By using a UVAWJ machining system with an Ultrasonic Vibration Power Workbench, the comparative experiment is conducted. The erosion surfaces of the single crystal silicon substrate were measured by Optical Profiler and observed with Scanning Electron Microscope. The material removal mechanisms are discussed. It is concluded that the erosion by UVAWJ, with the aid of high-frequency ultrasonic vibration, can obtains a high material removal, less cracks and good finish surface.
引用
收藏
页码：675 / +
页数：2
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