DOUBLE-ENDED TUNING FORK RESONANT STRAIN SENSOR OPERATED IN ATMOSPHERIC ENVIRONMENT USING A GALVANIC PROTECTION TECHNIQUE

被引：0

作者：

Wei, Wenshan ^{[1
,2
]}

Yu, Feng ^{[1
,2
]}

You, Weilong ^{[1
,2
]}

Liu, Dayang ^{[1
,2
]}

Yang, Heng ^{[1
]}

Li, Xinxin ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Labs Transducer Technol, Shanghai 200050, Peoples R China

[2] Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China

来源：

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年

关键词：

Resonant Strain Gauge; Double Ended Tuning Fork; Equivalent Circuit Model; MEMS; AIR;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a double-ended tuning fork (DETF) resonant strain sensor that is designed to operate in an atmospheric environment. The design is based on the fact that the driving amplitude at resonance increases with the increase of the gap width when the squeeze film damping dominates. An equivalent circuit model is developed. The main cause of feed-through has been revealed by the model and the experiments, and a symmetri- cal design is employed to suppress it. The sensor is fabricated using Au/Si galvanic protection. A very high yield has been achieved. The strain sensor presents a sensitivity of 39 Hz/mu epsilon and a quality factor of 1574 in an atmospheric environment.

引用

页码：1207 / 1210

页数：4

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