Enhanced piezoelectric response from barium strontium titanate multilayer films

被引:52
作者
Nath, R. [1 ,2 ]
Zhong, S. [1 ,2 ]
Alpay, S. P. [1 ,2 ]
Huey, B. D. [1 ,2 ]
Cole, M. W. [3 ]
机构
[1] Univ Connecticut, Mat Sci & Engn Program, Storrs, CT 06269 USA
[2] Univ Connecticut, Inst Sci Mat, Storrs, CT 06269 USA
[3] USA Res Lab, Active Mat Res Grp, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
关键词
D O I
10.1063/1.2825287
中图分类号
O59 [应用物理学];
学科分类号
摘要
Multilayered and homogeneous thin films of BaxSr1-xTiO3 (BST) were grown on Pt-coated Si substrates via metal-organic solution deposition. The multilayer 220 nm thick BST heterostructure consisted of Ba0.60Sr0.40TiO3, Ba0.75Sr0.25TiO3, and Ba0.90Sr0.10TiO3. A single composition 220 nm thick Ba0.60Sr0.40TiO3 was also grown for comparison. The piezoelectric properties were measured using piezoresponse force microscopy. There is approximately a 50% improvement in the piezoelectric response of the multilayered heterostructure compared to the homogeneous sample, with some spatial inhomogeneity. This enhancement can be attributed to the internal potential that arises from the polarization gradient and the commensurate built-in strain in the multilayer sample. (c) 2008 American Institute of Physics.
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页数:3
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