Preliminary investigation of SiC on silicon for biomedical applications

Reactive ion etching experiments were conducted with the intent of constructing a 3C-SiC on silicon heart probe to be used for biomedical applications. Experiments were performed with 3C-SiC as well as 4H-SiC in order to optimize the process for the heart probe construction. The heart probes were patterned on 3C-SiC on silicon to create a hybrid device that would combine the strength and inertness of the 3C-SiC material with the electronic compatibility of Si material to provide a complete probe suitable for reliable and disposable use required by the medical industry.