Optical detection heterogeneously integrated with a coplanar digital microfluidic lab-on-a-chip platform

被引：23

作者：

Evans, Randall ^{[1
]}

Luan, Lin ^{[1
]}

Jokerst, Nan Marie ^{[1
]}

Fair, Richard B. ^{[1
]}

机构：

[1] Duke Univ, Dept Elect & Comp Engn, Durham, NC 27706 USA

来源：

2007 IEEE SENSORS, VOLS 1-3 | 2007年

关键词：

D O I：

10.1109/ICSENS.2007.4388426

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

The intimate integration of optical components with microfluidics technology will enable next generation portable LoC systems that may completely contain optical generation, processing, and detection. Toward the chip scale integration of digital microfluidics with active compound semiconductor devices, heterogeneous integration technology is used in this paper to integrate thin film (approx 1 micron thick) compound semiconductor photodetectors with digital microfluidic systems. Each thin film InGaAs photodetector is bonded onto a glass platform, coated with Teflon AF, and integrated into the digital microfluidics system. The detection function is tested using the mixing and digital droplet movement of chemiluminescent compounds, which clearly indicate the functionality of the microfluidics system and the integrated thin film InGaAs photodetector.

引用

页码：423 / 426

页数：4

共 10 条

[1]

Cho SK, 2002, PROC IEEE MICR ELECT, P32, DOI 10.1109/MEMSYS.2002.984073

[2]

CHO SY, 2004, IEEE J SELECTED TOPI, V10

[3] Electrowetting droplet microfluidics on a single planar surface [J].

Cooney, Christopher G. ;

Chen, Chao-Yi ;

Emerling, Michael R. ;

Nadim, Ali ;

Sterling, James D. .

MICROFLUIDICS AND NANOFLUIDICS, 2006, 2 (05) :435-446

[4]

GONG M, 2002, 18 IEEE INT C, P726

[5] Electrowetting: From basics to applications [J].

Mugele, F ;

Baret, JC .

JOURNAL OF PHYSICS-CONDENSED MATTER, 2005, 17 (28) :R705-R774

[6]

PAIK PY, 2006, THESIS DUKE U

[7]

Pamula VK., 2005, Patent No. [US 6911132, 6911132]

[8] Electrowetting-based actuation of droplets for integrated microfluidics [J].

Pollack, MG ;

Shenderov, AD ;

Fair, RB .

LAB ON A CHIP, 2002, 2 (02) :96-101

[9] Electrowetting-based actuation of liquid droplets for microfluidic applications [J].

Pollack, MG ;

Fair, RB ;

Shenderov, AD .

APPLIED PHYSICS LETTERS, 2000, 77 (11) :1725-1726

[10] Characterization of electrowetting actuation on addressable single-side coplanar electrodes [J].

Yi, Ui-Chong ;

Kim, Chang-Jin .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (10) :2053-2059

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