Sub-aperture stitching test of a cylindrical mirror with large aperture

被引：6

作者：

Xue, Shuai ^{[1
,2
]}

Chen, Shanyong ^{[1
,2
]}

Shi, Feng ^{[1
,2
]}

Lu, Jinfeng ^{[1
,2
]}

机构：

[1] Natl Univ Def Technol, Coll Mechatron Engn & Automat, 47 Yanzheng St, Changsha 410073, Hunan, Peoples R China

[2] Hunan Key Lab Ultraprecis Machining Technol, 47 Yanzheng St, Changsha 410073, Hunan, Peoples R China

来源：

8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGY: OPTICAL TEST, MEASUREMENT TECHNOLOGY, AND EQUIPMENT | 2016年 / 9684卷

关键词：

Cylindrical mirrors; null test; CGH; subaperture stitching; MISALIGNMENT ABERRATIONS;

D O I：

10.1117/12.2242861

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Cylindrical mirrors are key optics of high-end equipment of national defense and scientific research such as high energy laser weapons, synchrotron radiation system, etc. However, its surface error test technology develops slowly. As a result, its optical processing quality can not meet the requirements, and the developing of the associated equipment is hindered. Computer Generated-Hologram (CGH) is commonly utilized as null for testing cylindrical optics. However, since the fabrication process of CGH with large aperture is not sophisticated yet, the null test of cylindrical optics with large aperture is limited by the aperture of the CGH. Hence CGH null test combined with subaperture stitching method is proposed to break the limit of the aperture of CGH for testing cylindrical optics, and the design of CGH for testing cylindrical surfaces is analyzed. Besides, the misalignment aberration of cylindrical surfaces is different from that of the rotational symmetric surfaces since the special shape of cylindrical surfaces, and the existing stitching algorithm of rotational symmetric surfaces can not meet the requirements of stitching cylindrical surfaces. We therefore analyze the misalignment aberrations of cylindrical surfaces, and study the stitching algorithm for measuring cylindrical optics with large aperture. Finally we test a cylindrical mirror with large aperture to verify the validity of the proposed method.

引用

页数：8

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