Solar-blind AlxGa1-xN-based avalanche photodiodes -: art. no. 223502

被引:29
作者
Tut, T [1 ]
Butun, S [1 ]
Butun, B [1 ]
Gokkavas, M [1 ]
Yu, HB [1 ]
Ozbay, E [1 ]
机构
[1] Bilkent Univ, Nanotechnol Res Ctr, TR-06800 Ankara, Turkey
关键词
D O I
10.1063/1.2135952
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the Metalorganic Chemical Vapor Deposition (MOCVD) growth, fabrication, and characterization of solar blind AlxGa1-xN/GaN-based avalanche photodiodes. The photocurrent voltage characteristics indicate a reproducible avalanche gain higher than 25 at a 72 V applied reverse bias. Under a 25 V reverse bias voltage, the 100 mu m diameter devices had a maximum quantum efficiency of 55% and a peak responsivity of 0.11 A/W at 254 nm, and a NEP of 1.89x10(-16) W/Hz(1/2). (c) 2005 American Institute of Physics.
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页码:1 / 3
页数:3
相关论文
共 11 条
[1]   Solar-blind AlGaN-based p-i-n photodiodes with low dark current and high detectivity [J].
Biyikli, N ;
Kimukin, I ;
Aytur, O ;
Ozbay, E .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (07) :1718-1720
[2]   GaN avalanche photodiodes [J].
Carrano, JC ;
Lambert, DJH ;
Eiting, CJ ;
Collins, CJ ;
Li, T ;
Wang, S ;
Yang, B ;
Beck, AL ;
Dupuis, RD ;
Campbell, JC .
APPLIED PHYSICS LETTERS, 2000, 76 (07) :924-926
[3]   High-performance solar-blind photodetector using an Al0.6Ga0.4N n-type window layer [J].
Chowdhury, U ;
Wong, MM ;
Collins, CJ ;
Yang, B ;
Denyszyn, JC ;
Campbell, JC ;
Dupuis, RD .
JOURNAL OF CRYSTAL GROWTH, 2003, 248 :552-555
[4]   Solar-blind AlxGa1-xN-based metal-semiconductor-metal ultraviolet photodetectors [J].
Li, T ;
Lambert, DJH ;
Beck, AL ;
Collins, CJ ;
Yang, B ;
Wong, MM ;
Chowdhury, U ;
Dupuis, RD ;
Campbell, JC .
ELECTRONICS LETTERS, 2000, 36 (18) :1581-1583
[5]   GaN avalanche photodiodes grown by hydride vapor-phase epitaxy [J].
McIntosh, KA ;
Molnar, RJ ;
Mahoney, LJ ;
Lightfoot, A ;
Geis, MW ;
Molvar, KM ;
Melngailis, I ;
Aggarwal, RL ;
Goodhue, WD ;
Choi, SS ;
Spears, DL ;
Verghese, S .
APPLIED PHYSICS LETTERS, 1999, 75 (22) :3485-3487
[6]   Ultraviolet photon counting with GaN avalanche photodiodes [J].
McIntosh, KA ;
Molnar, RJ ;
Mahoney, LJ ;
Molvar, KM ;
Efremow, N ;
Verghese, S .
APPLIED PHYSICS LETTERS, 2000, 76 (26) :3938-3940
[7]   Avalanche breakdown and breakdown luminescence in p-π-n GaN diodes [J].
Osinsky, A ;
Shur, MS ;
Gaska, R ;
Chen, Q .
ELECTRONICS LETTERS, 1998, 34 (07) :691-692
[8]   Schottky barrier photodetectors based on AlGaN [J].
Osinsky, A ;
Gangopadhyay, S ;
Lim, BW ;
Anwar, MZ ;
Khan, MA ;
Kuksenkov, DV ;
Temkin, H .
APPLIED PHYSICS LETTERS, 1998, 72 (06) :742-744
[9]   High bandwidth-efficiency solar-blind AlGaN Schottky photodiodes with low dark current [J].
Tut, T ;
Biyikli, N ;
Kimukin, I ;
Kartaloglu, T ;
Aytur, O ;
Unlu, MS ;
Ozbay, E .
SOLID-STATE ELECTRONICS, 2005, 49 (01) :117-122
[10]   GaN avalanche photodiodes operating in linear-gain mode and Geiger mode [J].
Verghese, S ;
McIntosh, KA ;
Molnar, RJ ;
Mahoney, LJ ;
Aggarwal, RL ;
Geis, MW ;
Molvar, KM ;
Duerr, EK ;
Melngailis, I .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2001, 48 (03) :502-511