3D free space thermally actuated micromirror device

被引：49

作者：

Singh, J ^{[1
]}

Gan, T ^{[1
]}

Agarwal, A ^{[1
]}

Mohanraj ^{[1
]}

Liw, S ^{[1
]}

机构：

[1] ASTAR, Inst Microelect, Singapore 117685, Singapore

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 123-24卷

关键词：

thermal actuator; micromirror; MEMS; 3D free space optical switch; analogue switch; silicon mirror; optical cross-connect; micromirror switch;

D O I：

10.1016/j.sna.2005.02.037

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A thermally actuated free space single crystal silicon micromirror device has been developed using one wafer low cost fabrication process. The device consists of a central mirror plate symmetrically joined with four thermal bimorph actuators through flexural springs. All the structural components of the device are fabricated in single crystal silicon using bulk silicon micromachining technology. Composite cantilevers of single crystal silicon, silicon dioxide, and aluminum are used as bimorph thermal actuators. This is an analogue micromirror device, which operates very accurately within an angular range for steering light beam in free space. The micromirror was demonstrated to achieve up to 10 degrees repeatable angular deflection, 8-13 ms thermal response time, and 29 cm radius of curvature. The device was operated continuously for 100 million switching cycles at 40 Hz; no change in performance was observed which shows a good structural reliability. The target application area is optical communication networks; however, the device is equally useful for other scanning type of applications. (C) 2005 Elsevier B.V. All rights reserved.

引用

页码：468 / 475

页数：8

共 17 条

[1] Curvature compensation in micromirrors with high-reflectivity optical coatings [J].