Qualitative Estimation of Si-rich a-SiNx:H Thin Film Composition by Soft X-ray Reflectivity Analysis

被引：0

作者：

Singh, Sarab Preet ^{[1
]}

Modi, Mohammed H. ^{[2
]}

Srivastava, P. ^{[1
]}

机构：

[1] Indian Inst Technol Delhi, Dept Phys, Nanostech Lab, New Delhi 110016, India

[2] Raja Ramana Ctr Adv Technol, Indus Synchrotron Utilizat Div, Indore 452013, India

来源：

SOLID STATE PHYSICS: PROCEEDINGS OF THE 55TH DAE SOLID STATE PHYSICS SYMPOSIUM 2010, PTS A AND B | 2011年 / 1349卷

关键词：

Silicon rich silicon nitride; soft X-ray reflectivity;

D O I：

10.1063/1.3606033

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Soft x-ray reflectivity measurements on Si-rich a-SiNx:H thin film near the Si L-2,L-3 absorption edge are presented. We demonstrate that the combined study of soft x-ray reflectivity and precise analysis of optical index profile derived over extended wavelength region lengths can provide a qualitative estimation of film composition.

引用

页码：665 / +

页数：2

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