Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF2 optical micro resonator

被引：20
作者：
Kakinuma, Yasuhiro [1 ]
Azami, Shunya [1 ]
Tanabe, Takasumi [1 ]
机构：
[1] Keio Univ, Fac Sci & Technol, Dept Syst Design Engn, Yokohama, Kanagawa 223, Japan
来源：
CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2015年 / 64卷 / 01期
关键词：
Ultra-precision; Surface integrity; Optical micro-resonator;
D O I：
10.1016/j.cirp.2015.04.076
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF2) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF2 optical micro-resonators. In this study. the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0 degrees rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance. (C) 2015 CIRP.
引用
收藏
页码：117 / 120
页数：4
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