High-efficiency GaN/AlxGa1-xN multi-quantum well light emitter grown on low-dislocation density AlxGa1-xN

被引:0
作者
Iwaya, M [1 ]
Nakamura, R [1 ]
Terao, S [1 ]
Ukai, T [1 ]
Kamiyama, S [1 ]
Amano, H [1 ]
Akasaki, I [1 ]
机构
[1] Meijo Univ, Dept Elect & Elect Engn, Tempaku Ku, Nagoya, Aichi 4688502, Japan
来源
PROCEEDINGS OF THE INTERNATIONAL WORKSHOP ON NITRIDE SEMICONDUCTORS | 2000年 / 1卷
关键词
AlxGa1-xN; low-temperature-interlayer; lateral growth; threading dislocation; high quality GaN/Al0.08Ga0.82N MQW;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Crack-free and low-dislocation density AlxGa1-xN was developed using low-temperature-deposited interlayer technique in combination with a lateral seeding epitaxy. GaN/Al0.08Ga0.92N:Si multi-quantum well grown on the newly developed Al0.22Ga0.78N layer contains threading dislocation density less than 10(8) cm(-2). PL peak intensity increased almost two orders of magnitude.
引用
收藏
页码:833 / 836
页数:4
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