Formation mechanisms of nanocomposite layers based on multiwalled carbon nanotubes and non-stoichiometric tin oxide

被引：16

作者：

Bolotov, V. V. ^{[1
]}

Kan, V. E. ^{[1
]}

Korusenko, P. M. ^{[1
]}

Nesov, S. N. ^{[1
]}

Povoroznyuk, S. N. ^{[1
]}

Ponomareva, I. V. ^{[1
]}

Roslikov, V. E. ^{[1
]}

Sten'kin, Yu. A. ^{[1
]}

Shelyagin, R. V. ^{[1
]}

Knyazev, E. V. ^{[1
]}

机构：

[1] Russian Acad Sci, Siberian Branch, AV Rzhanov Inst Semicond Phys, Omsk Branch, Omsk 644018, Russia

来源：

PHYSICS OF THE SOLID STATE | 2012年 / 54卷 / 01期

基金：

俄罗斯基础研究基金会;

关键词：

POROUS SILICON; GAS SENSORS; NO2; PURIFICATION; SENSITIVITY; FILMS;

D O I：

10.1134/S1063783412010076

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Nanocomposite layers based on multiwalled carbon nanotubes (MWCNTs) and non-stoichiometric tin oxide (SnO (x) ) have been grown by magnetron deposition and CVD methods. In the case of the CVD method, the study of the structure and phase composition of obtained nanocomposite layers has shown that a tin oxide "superlattice" is formed in the MWCNT layer volume, fixed by SnO (x) islands on the MWCNT surface. During magnetron deposition, the MWCNT surface is uniformly coated with tin oxide islands, which causes a change in properties of individual nanotubes. Electrical measurements have revealed the sensitivity of nanocomposite layers to (NO2)(-) molecule adsorption, which is qualitatively explained by a change in the conductivity of the semiconductor fraction of p-type MWCNTs.

引用

页码：166 / 173

页数：8

共 27 条

[1] Permeated porous silicon for hydrocarbon sensor fabrication [J].