Gas Sensing Properties of In2O3 Nano-Films Obtained by Low Temperature Pulsed Electron Deposition Technique on Alumina Substrates

被引：8

作者：

Addabbo, Tommaso ^{[1
]}

Bruzzi, Mara ^{[2
]}

Fort, Ada ^{[1
]}

Mugnaini, Marco ^{[1
]}

Vignoli, Valerio ^{[1
]}

机构：

[1] Univ Siena, Dept Informat Engn & Math Sci, Via Roma 56, I-53100 Siena, Italy

[2] Univ Firenze, Dept Phys & Astron, Via G Sansone 1, I-50019 Sesto Fiorentino, FI, Italy

来源：

SENSORS | 2018年 / 18卷 / 12期

关键词：

metal oxide gas sensors; nano-structured device; pulsed electron deposition technique; sensor modeling; SENSORS; KINETICS; SURFACE; NOX;

D O I：

10.3390/s18124410

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Nanostructured Indium(III) oxide (In2O3) films deposited by low temperature pulsed electron deposition (LPED) technique on customized alumina printed circuit boards have been manufactured and characterized as gas sensing devices. Their electrical properties have monitored directly during deposition to optimize their sensing performance. Experimental results with oxidizing (NO2) as well as reducing (CO) gases in both air and inert gas carriers are discussed and modeled.

引用

页数：17

共 28 条

[21]

Muller G., 1995, SCI TECHNOLOGY THIN, P89, DOI DOI 10.1142/9789814261425_0004

[22] Electrical transport, electrothermal transport, and effective electron mass in single-crystalline In2O3 films [J].

Preissler, Natalie ;

Bierwagen, Oliver ;

Ramu, Ashok T. ;

Speck, James S. .

PHYSICAL REVIEW B, 2013, 88 (08)

[23] The role of surface electron accumulation and bulk doping for gas-sensing explored with single-crystalline In2O3 thin films [J].

Rombach, Julius ;

Papadogianni, Alexandra ;

Mischo, Markus ;

Cimalla, Volker ;

Kirste, Lutz ;

Ambacher, Oliver ;

Berthold, Theresa ;

Krischok, Stefan ;

Himmerlich, Marcel ;

Selve, Soeren ;

Bierwagen, Oliver .

SENSORS AND ACTUATORS B-CHEMICAL, 2016, 236 :909-916

[24] loading induced excellent NO2 gas sensing of 3DOM In2O3 at room temperature [J].

Wang, Zhihua ;

Men, Geling ;

Zhang, Ruixue ;

Gu, Fubo ;

Han, Dongmei .

SENSORS AND ACTUATORS B-CHEMICAL, 2018, 263 :218-228

[25] Semiconducting metal oxides as sensors for environmentally hazardous gases [J].

Wetchakun, K. ;

Samerjai, T. ;

Tamaekong, N. ;

Liewhiran, C. ;

Siriwong, C. ;

Kruefu, V. ;

Wisitsoraat, A. ;

Tuantranont, A. ;

Phanichphant, S. .

SENSORS AND ACTUATORS B-CHEMICAL, 2011, 160 (01) :580-591

[26] Hierarchical nanorod-flowers indium oxide microspheres and their gas sensing properties [J].

Xu, Xiumei ;

Zhang, Haijiao ;

Hu, Xiaolong ;

Sun, Peng ;

Zhu, Yongsheng ;

He, Chaozheng ;

Hou, Shujin ;

Sun, Yanfeng ;

Lu, Geyu .

SENSORS AND ACTUATORS B-CHEMICAL, 2016, 227 :547-553

[27] Annealing effects of In2O3 thin films on electrical properties and application in thin film transistors [J].

Yuan, Zijian ;

Zhu, Xiaming ;

Wang, Xiong ;

Cai, Xikun ;

Zhang, Bingpo ;

Qiu, Dongjiang ;

Wu, Huizhen .

THIN SOLID FILMS, 2011, 519 (10) :3254-3258

[28] Recent advances in 1D micro- and nanoscale indium oxide structures [J].

Zhang, Zhi-Guang ;

Wang, Xiao-Xiong ;

Zhang, Jun ;

Yu, Miao ;

Zhang, Jun-Cheng ;

Zhang, Hong-Di ;

Long, Yun-Ze .

JOURNAL OF ALLOYS AND COMPOUNDS, 2018, 752 :359-375

← 1 2 3 →