A Review of UltraHigh Frequency Ultrasonic Transducers

被引：22
作者：
Chen, Jun [1 ]
Fei, Chunlong [1 ]
Lin, Danmei [1 ]
Gao, Pengkai [1 ]
Zhang, Junshan [2 ]
Quan, Yi [3 ]
Chen, Dongdong [1 ]
Li, Di [1 ]
Yang, YinTang [1 ]
机构：
[1] Xidian Univ, Sch Microelect, Xian, Peoples R China
[2] Univ Peoples Armed Police, Sch Equipment Management & Support, Xian, Peoples R China
[3] Sch Xian Jiaotong Univ, Xian, Peoples R China
来源：
FRONTIERS IN MATERIALS | 2022年 / 8卷
基金：
中国国家自然科学基金;
关键词：
ultrahigh frequency; ultrasonic transducer; piezoelectric material; MEMS technology; acoustic lens; scanning acoustic microscope; ZIRCONATE-TITANATE CERAMICS; OPTIMIZATION DESIGN; SINGLE-CRYSTALS; COMPOSITE FILMS; LIQUID LENS; FABRICATION; EFFICIENT; DEPOSITION; LAYERS;
D O I：
10.3389/fmats.2021.733358
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The ultrahigh-frequency (UHF) ultrasonic transducers are active in various fields, including nondestructive evaluation in the semiconductor industry, microscopic biological organization imaging in biomedicine, particle manipulation, and so on. In these fields ultrahigh-frequency (UHF) ultrasonic transducers play a critical role in the performance of related equipment. This article will focus on the topic of ultrahigh-frequency ultrasonic transducers' preparation, and reviews three aspects: material selection, focus design, and acoustic energy transmission matching. Provides a summary of the current research status, and puts forward some views on the future development of UHF ultrasound devices.
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收藏
页数：16
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