Design and Validation of a Simulation-based Modular Planning and Scheduling System of Semiconductor Fabrication Facilities

A simulation-based modular planning and scheduling system developed for semiconductor fabrication facilities (SFFs) is discussed. Firstly, the general structure model (GSM) for SFFs, composed of a configurable definition layer, a physical layer, a process information layer and a planning and scheduling layer, is proposed. Secondly, a data-based dynamic simulation modeling method is given. Thirdly, a simulation-based modular planning and scheduling system (SMPSS) for SFFs, including model modules, release control modules, scheduling modules and rescheduling modules, is designed and developed. Finally, a case study is used to demonstrate the effectiveness of SMPSS.