The investigation of optical and electrical properties of N+-implanted amorphous diamond-like carbon (DLC) films

被引：7

作者：

Faizrakhmanov, IA ^{[1
]}

Bazarov, VV ^{[1
]}

Zhikharev, VA ^{[1
]}

Khaibullin, IB ^{[1
]}

机构：

[1] RAS, Phys Tech Inst, Kazan 420029, Russia

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1999年 / 148卷 / 1-4期

关键词：

implantation; diamond-like carbon optical and electrical properties;

D O I：

10.1016/S0168-583X(98)00856-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Optical and electrical properties of diamond-like carbon (DLC) films irradiated by N+ ions with energy 25 keV in the dose range from 3x10(14) to 3x10(17) cm(-2) were investigated. It was shown that the dose dependencies of optical and electrical properties of N+-implanted DLC films were different from those for the C+-implanted case in the moderate and high dose ranges due to carbon nitride phase formation. On the basis of dose dependencies three different steps of structural changes of N+-implanted DLC films can be distinguished: transformation of sp(3) + sp(2) mixture to sp(2) and growth of pi-clusters; the nucleation of carbon nitride phase and the decrease of pi-cluster concentration; the growth of carbon nitride nuclei and the decrease of pi-cluster sizes. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：669 / 672

页数：4

共 5 条

[1] Optical and electrical properties of C+-implanted amorphous diamond-like carbon films [J].