Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths (vol 39, 043408, 2021)

被引：5
作者：
Beliaev, Leonid Yu. [1 ]
Shkondin, Evgeniy [2 ]
Lavrinenko, Andrei V. [1 ]
Takayama, Osamu [1 ]
机构：
[1] Tech Univ Denmark, Dept Photon Engn, DTU Foton, Orsteds Plads 343, DK-2800 Lyngby, Denmark
[2] Tech Univ Denmark, Natl Ctr Nano Fabricat & Characterizat, DTU Nanolab, Orsteds Plads 347, DK-2800 Lyngby, Denmark
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2022年 / 40卷 / 02期
关键词：
D O I：
10.1116/6.0001574
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页数：3
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