White-light interferometry-Envelope detection by Hilbert transform and influence of noise

被引：62

作者：

Pavlicek, Pavel ^{[1
]}

Michalek, Vaclav ^{[1
]}

机构：

[1] Palacky Univ, Fac Sci, Reg Ctr Adv Technol & Mat, Joint Lab Opt Palacky Univ & Inst Phys Acad Sci C, CZ-77146 Olomouc, Czech Republic

来源：

OPTICS AND LASERS IN ENGINEERING | 2012年 / 50卷 / 08期

关键词：

White-light interferometry; Hilbert transform; Noise; Envelope detection; Measurement uncertainty; ROUGH SURFACES;

D O I：

10.1016/j.optlaseng.2012.02.008

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

White-light interferometry is an established method for the measurement of the geometrical shape of objects. It can also be used for the measurement of the shape of objects with rough surfaces. Because of the rough surface, the phase of the white-light interferogram is not evaluated, the height information is obtained from the interferogram envelope. Hilbert transform is a classical method to calculate the envelope. In a real measurement, the interferogram is affected by the noise. We look for the answer to following questions: how does the noise of the calculated envelope look like? How does the noise influence the measurement uncertainty? (C) 2012 Elsevier Ltd. All rights reserved.

引用

页码：1063 / 1068

页数：6