Regimes of GaAs quantum dot self-assembly by droplet epitaxy

被引:120
|
作者
Heyn, Ch.
Stemmann, A.
Schramm, A.
Welsch, H.
Hansen, W.
Nemcsics, A.
机构
[1] Inst Angewandte Phys & Zentrum Mikrostrukturfor, D-20355 Hamburg, Germany
[2] Hungarian Acad Sci, Res Inst Tech Phys & Mat Sci, H-1525 Budapest, Hungary
来源
PHYSICAL REVIEW B | 2007年 / 76卷 / 07期
关键词
D O I
10.1103/PhysRevB.76.075317
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Two regimes are observed for the density of strain-free GaAs quantum dots (QDs) grown by Ga droplet epitaxy. QDs grown from liquid Ga droplets deposited at temperatures up to 200 degrees C exhibit densities that qualitatively agree with classical nucleation theory and are quantitatively reproduced by a rate equations based growth model under consideration of dimer break off. In contrast, at higher growth temperatures, the onset of coarsening by Ostwald ripening [Z. Phys. Chem., Stoechiom. Verwandtschaftsl. 34, 495 (1900)] causes drastically reduced QD densities. Extension of the growth models and consideration of Ostwald ripening allow the quantitative prediction of QD densities in this regime, as well.
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页数:4
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