Fabrication of high quality superconducting tunnel junctions

被引：0
作者：
Akoh, H
Nakagawa, H
Joosse, K
Aoyagi, M
Esposito, A
Maehata, K
Ishibashi, K
Takada, S
机构：
[1] Electrotech Lab, Ibaraki 305, Japan
[2] Kyushu Univ, Higashi Ku, Fukuoka 812, Japan
[3] Saitama Univ, Urawa, Saitama 338, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷
关键词：
superconducting tunnel junction; radiation detection; high current density; large junction; low leakage;
D O I：
10.7567/JJAPS.37S2.10
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
High quality Nb/AlOx/Nb superconducting tunnel junctions (STJs) are fabricated for the radiation detection. The fabrication process includes a MgO thin film, an underlayer method, a control of critical current, a nitrogen plasma passivation, and a SiO2 insulating layer. Subgap current characteristics of STJs have been investigated in the temperature range of 0.35K to 4.2K in order to evaluate the junction quality for the radiation detection. The STJs fabricated by present process show extremely high quality junction characteristics with a leakage current density of 0.1 pA/mu m(2), a resistance ratio R-d/R-n of 6x10(6) for a 200x200-mu m(2) STJ with a critical current density of (7)200A/cm(2).
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页码：10 / 12
页数：3
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