[1] Ilie Murgulescu Romanian Acad, Inst Phys Chem, Bucharest, Romania
[2] Natl Inst Res & Dev Microtechnol, Bucharest 077190, Voluntari, Romania
[3] NANOM MEMS SRL, Rasnov, Romania
[4] Transilvania Univ Brasov, Brasov, Romania
[5] Ctr Energy Res MFA, Inst Tech Phys & Mat Sci, Budapest, Hungary
[6] Obuda Univ, Inst Microelect & Technol, Budapest, Hungary
[7] Univ Pannonia, Res Inst Biomol & Chem Engn, Veszprem, Hungary