X-ray emission in the 'water window' from a nitrogen gas puff target irradiated with a nanosecond Nd:Glass laser pulse

被引：39
作者：
Fiedorowicz, H
Bartnik, A
Jarocki, R
Szczurek, M
Wilhein, T
机构：
[1] Mil Univ Technol, Inst Optoelect, PL-01489 Warsaw, Poland
[2] Univ Gottingen, FE Rontgenphys, D-37073 Gottingen, Germany
来源：
APPLIED PHYSICS B-LASERS AND OPTICS | 1998年 / 67卷 / 03期
关键词：
D O I：
10.1007/s003400050521
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Measurements of X-ray emission in the wavelength range of 2-3 nm from a high-density nitrogen gas puff target irradiated with a nanosecond Nd:glass laser pulse were performed with an absolutely calibrated reflection grating spectrograph. The use of a gas puff target instead of a solid target eliminates the production of debris associated with solid targets, saving the high X-ray yield, compared to that obtained for solid targets. The laser-produced X-ray source based on a high-density nitrogen gas puff target could be employed in X-ray microscopy.
引用
收藏
页码：391 / 393
页数：3
相关论文
共 23 条
  • [1] Extreme UV lithography: A new laser plasma target concept and fabrication of multilayer reflection masks
    Bijkerk, F
    Shmaenok, LA
    Louis, E
    Voorma, HJ
    Koster, NB
    Bruineman, C
    Bastiaensen, RKFJ
    vanderDrift, EWJM
    Romijn, J
    deGroot, LEM
    Rousseeuw, BAC
    Zijlstra, T
    Platonov, YY
    Salashchenko, NN
    [J]. MICROELECTRONIC ENGINEERING, 1996, 30 (1-4) : 183 - 186
  • [2] Particle emission debris from a KrF laser-plasma x-ray source
    Bobkowski, R
    Fedosejevs, R
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (04): : 1973 - 1980
  • [3] INVESTIGATION OF A LASER-PRODUCED PLASMA VUV LIGHT-SOURCE
    BRIDGES, JM
    CROMER, CL
    MCILRATH, TJ
    [J]. APPLIED OPTICS, 1986, 25 (13): : 2208 - 2214
  • [4] Optimization of x-ray sources for proximity lithography produced by a high average power Nd:glass laser
    Celliers, P
    DaSilva, LB
    Dane, CB
    Mrowka, S
    Norton, M
    Harder, J
    Hackel, L
    Matthews, DL
    Fiedorowicz, H
    Bartnik, A
    Maldonado, JR
    Abate, JA
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 79 (11) : 8258 - 8268
  • [5] Debrisless laser-produced x-ray source with a gas puff target
    Fiedorowicz, H
    Bartnik, A
    Kostecki, J
    Szczurek, M
    [J]. ELECTRON-BEAM, X-RAY, EUV, AND ION-BEAM SUBMICROMETER LITHOGRAPHIES FOR MANUFACTURING VI, 1996, 2723 : 310 - 316
  • [6] X-RAY-EMISSION FROM LASER-IRRADIATED GAS PUFF TARGETS
    FIEDOROWICZ, H
    BARTNIK, A
    PATRON, Z
    PARYS, P
    [J]. APPLIED PHYSICS LETTERS, 1993, 62 (22) : 2778 - 2780
  • [7] GENERATION OF NANOSECOND SOFT-X-RAY PULSES AS A RESULT OF INTERACTION OF THE ND-GLASS LASER-RADIATION WITH GAS PUFF TARGETS
    FIEDOROWICZ, H
    BARTNIK, A
    PATRON, Z
    PARYS, P
    [J]. LASER AND PARTICLE BEAMS, 1994, 12 (03) : 471 - 483
  • [8] Fiedorowicz H., 1992, XRAY OPTICS MICROANA, P515
  • [9] PROTOTYPE HIGH-SPEED TAPE TARGET TRANSPORT FOR A LASER-PLASMA SOFT-X-RAY PROJECTION LITHOGRAPHY SOURCE
    HANEY, SJ
    BERGER, KW
    KUBIAK, GD
    ROCKETT, PD
    HUNTER, J
    [J]. APPLIED OPTICS, 1993, 32 (34): : 6934 - 6937
  • [10] NEW LASER-PLASMA SOURCE FOR EXTREME-ULTRAVIOLET LITHOGRAPHY
    JIN, F
    RICHARDSON, M
    [J]. APPLIED OPTICS, 1995, 34 (25): : 5750 - 5760
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