Cluster generation under pulsed laser ablation of zinc oxide

被引:17
作者
Bulgakov, Alexander V. [1 ]
Evtushenko, Anton B. [1 ]
Shukhov, Yuri G. [1 ]
Ozerov, Igor [2 ]
Marine, Wladimir [2 ]
机构
[1] Inst Thermophys SB RAS, Novosibirsk 630090, Russia
[2] Univ Aix Marseille 2, CINaM, CNRS, UPR 3118, F-13288 Marseille, France
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2010年 / 101卷 / 04期
基金
俄罗斯基础研究基金会;
关键词
MASS-SPECTROMETRY; ZNO; NANOCLUSTERS; SILICON; PLUME; TIME; PHOTOLUMINESCENCE; DEPOSITION; FILMS;
D O I
10.1007/s00339-010-5921-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Neutral and cationic ZnnOm clusters of various stoichiometry have been produced by nanosecond laser ablation of ZnO in vacuum and investigated by time-of-flight mass spectrometry. Particular attention was paid to the effect of laser wavelength (in the range from near-IR to UV) on cluster composition. Under 193-nm laser ablation, the charged clusters are essentially substoichiometric with ZnnOn-1+ and ZnnOn-3+ being the most abundant series. Both sub-and stoichiometric cationic clusters are generated in abundance at 532- and 1064-nm ablation whose composition depends on the cluster size. The reactivity of small stoichiometric ZnnOn+ clusters (n < 11) toward hydrogen is found to be high, while oxygen-deficient species are less reactive. The neutral plume particles are mainly stoichiometric with Zn4O4 tetramer being a magic cluster. It is suggested that the Zn4O4 loss is the dominant fragmentation channel of large zinc oxide clusters upon electron impact. Plume expansion conditions under ZnO ablation with visible and IR laser pulses are shown to be favorable for stoichiometric cluster formation.
引用
收藏
页码:585 / 589
页数:5
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