Comparison of the optical properties of ZnO thin films grown on various substrates by pulsed laser deposition

被引：38
|
作者：
Bae, SH
Lee, SY
Kim, HY
Im, S
机构：
[1] Yonsei Univ, Dept Elect & Comp Engn, Seodaemun Ku, Seoul 120749, South Korea
[2] Yonsei Univ, Inst Phys & Appl Phys, Seodaemun Ku, Seoul 120749, South Korea
[3] Yonsei Univ, Dept Phys, Seodaemun Ku, Seoul 120749, South Korea
来源：
APPLIED SURFACE SCIENCE | 2000年 / 168卷 / 1-4期
关键词：
ZnO; PLD; UV; XRD; PL; stoichiometry;
D O I：
10.1016/S0169-4332(00)00781-9
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Various substrates were compared for the investigation of the optical properties of ZnO thin films. ZnO thin films have been deposited on (I 0 0) p-type silicon substrates and (0 0 I) sapphire substrates by pulsed laser deposition (PLD) technique using a Nd:YAG laser with the wavelength of 355 nm. Oxygen was used as ambient gas. Substrate temperatures were varied in the range of 200-600 degreesC at a fixed oxygen gas pressure of 350 mTorr. We have investigated substrate effect on the optical and structural properties of ZnO thin films using X-ray diffraction (XRD) and photoluminescence (PL). (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：332 / 334
页数：3
相关论文
共 50 条
  • [21] Growth and Characterization of ZnO thin Films Grown by Pulsed Laser Deposition
    He, Jianting
    Tan, Boxue
    Wei, Qinqin
    Su, Yuanbin
    Yang, Shulian
    MANUFACTURING SCIENCE AND TECHNOLOGY, PTS 1-8, 2012, 383-390 : 6289 - 6292
  • [22] Epitaxial properties of ZnO thin films on LaAlO3 substrates by pulsed laser deposition
    Jia, C. H.
    Wang, S.
    Wu, Y. H.
    Chen, Y. H.
    Sun, X. W.
    Zhang, W. F.
    JOURNAL OF CRYSTAL GROWTH, 2015, 421 : 19 - 22
  • [23] Optical properties of As doped ZnO thin films prepared by pulsed laser deposition technique
    Shan, FK
    Shin, BC
    Kim, SC
    Yu, YS
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2004, 24 (06) : 1861 - 1864
  • [24] Undoped and Al-doped ZnO films with tuned properties grown by pulsed laser deposition
    Papadopoulou, E. L.
    Varda, M.
    Kouroupls-Agalou, K.
    Androulidaki, M.
    Chikoidze, E.
    Galtier, P.
    Huyberechts, G.
    Aperathitis, E.
    THIN SOLID FILMS, 2008, 516 (22) : 8141 - 8145
  • [25] Structural, morphological and optical properties of ZnO thin films grown on γ-LiAlO2 substrate by pulsed laser deposition
    Zou, J
    Zhou, SM
    Zhang, X
    Su, FL
    Li, XM
    Xu, J
    JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2005, 21 (04) : 549 - 551
  • [26] Structural, electrical, and optical properties of germanium-doped ZnO thin films deposited by pulsed laser deposition technique
    Shan, F. K.
    Liu, G. X.
    Lee, W. J.
    Shin, B. C.
    Kim, K. H.
    INTEGRATED FERROELECTRICS, 2008, 98 : 199 - 207
  • [27] Optical properties of pulsed-laser deposited ZnO thin films
    Bazavan, R.
    Ion, L.
    Socol, G.
    Enculescu, I.
    Bazavan, D.
    Tazlaoanu, C.
    Lorinczi, A.
    Mihailescu, I. N.
    Popescu, M.
    Antohe, S.
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2009, 11 (04): : 425 - 428
  • [28] Effect of substrate temperature on microstructural and optical properties of ZnO films grown by pulsed laser deposition
    HE Jianting
    RareMetals, 2006, (02) : 161 - 165
  • [29] Effect of substrate temperature on microstructural and optical properties of ZnO films grown by pulsed laser deposition
    He, JT
    Zhuang, HZ
    Xue, CS
    Wang, SY
    Hu, LJ
    Xue, SB
    RARE METALS, 2006, 25 (02) : 161 - 165
  • [30] Study of the structure properties of Co-doped ZnO thin films grown by pulsed laser deposition
    Yousif, Ali A.
    Haidar, Adawiya J.
    Habubi, Nadir F.
    INTERNATIONAL JOURNAL OF NANOELECTRONICS AND MATERIALS, 2012, 5 (01): : 47 - 55
12345