Influence of oxygen content on the reduction of the ordering temperature of L10 FePtCu alloy

被引:4
作者
Kikitsu, A [1 ]
Maeda, T
Kai, T
Nagase, T
Akiyama, J
Fujioka, N
Ishigami, T
机构
[1] Toshiba Co Ltd, Ctr Corp Res & Dev, Kanagawa 2128582, Japan
[2] Toshiba Co Ltd, Display Devices & Components Co, Yokohama, Kanagawa 2358522, Japan
关键词
composite target; disorder-order transformation; Fe-Pt ordered alloy; ordering temperature; residual oxygen;
D O I
10.1109/TMAG.2003.815574
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The influence of the residual oxygen on the ordering (transformation from fcc to fct) temperature of sputtered Fe-Pt-Cu films was investigated. Secondary ion mass spectroscopy analysis revealed that high oxygen content increases the onset temperature of the ordering process. The oxygen is brought into an Fe-Pt-Cu film during the deposition process and forms stable Fe-O compound. This might increase the ordering temperature as well as prevent the coalescence of grains, that is, the nucleation of phase transformation. A hot-pressed Fe-Pt composite target which contains oxygen of 50 ppm was developed. This target is also effective for reducing the ordering temperature of Fe-Pt films.
引用
收藏
页码:2720 / 2722
页数:3
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