Design of a CMOS compatible thin ZnO film base, and a LiNbO3 wafer base, Surface Acoustics Wave (SAW) gas sensors that are highly selective and sensitive are described. Furthermore, Design an post CMOS processing fabrication steps that utilizes micro-electro-mechanical systems (MEMS) techniques to implement SAW gas sensor is presented. Rayleigh wave velocity for various ZnO film thickness is simulated and results are presented. Velocity calculation is based on a computer simulation of multiplayer (ZnO/SiO2/Si) structure that uses wave equations. Simulation results and experimental measurements of SA W sensors with single layer bulk LiNbO3 wafer are shown, and compared. Moreover, results of experimentation and simulation of wave velocity for a yz-cut LiNbO3 wafer is shown.
