Two-dimensional Wave-front Tilt Sensor using a Two-dimensional Transmission Grating

被引：0

作者：

Iwata, Koichi ^{[1
]}

Satoh, Kazuo ^{[1
]}

Moriwaki, Kousuke ^{[1
]}

机构：

[1] Technol Res Inst Osaka Prefecture, Izumi Ku, Osaka 5941157, Japan

来源：

INTERNATIONAL CONFERENCE ON ADVANCED PHASE MEASUREMENT METHODS IN OPTICS AN IMAGING | 2010年 / 1236卷

关键词：

Tilt sensor; Grating; Fourier optics; ANGLE MEASUREMENT; INTERFEROMETRY;

D O I：

10.1063/1.3426120

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A collimated wave reflected by a plane mirror is introduced on a hexagonal transmission grating. Intensity of the diffracted wave is detected by an image sensor located at a small distance from the grating. The intensity of the grating image or grating shadow on the sensor displaces according to the tilt of the incident wave. Three components of the displacement are detected from phase shifts of three components of the grating. They are calculated by Fourier transform method. With the displacements we can calculate 2-D tilt of the plane wave. This method can be applied to a compact sensor for detecting 2-D tilt of the mirror or wave-front like an autocollimator.

引用

页码：242 / 247

页数：6

共 6 条

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