Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures

An atomic force microscope (AFM) cantilever based coordinate measuring probe applicable for true three dimensional measurements of microstructures is presented. The probe has a shaft glued to a commercial AFM cantilever and a probing sphere located at the free end of the shaft. A conventional optical lever method is applied to detect the bending, torsion, and the dynamic behavior of the AFM cantilever which will change dramatically when the probe sphere is in proximity to the object to be measured. The probe has advantages such as small probing force (< 1 mu N), high probing sensitivity allowing nanometer measurement resolution, easy exchange of probing elements, and low cost. Measurements of a microgear and a fuel injection nozzle using the developed probe are demonstrated, indicating its promising application potential.