Large-area, selective transfer of microstructured silicon: A printing-based approach to high-performance thin-film transistors supported on flexible substrates

被引:121
作者
Lee, KJ
Motala, MJ
Meitl, MA
Childs, WR
Menard, E
Shim, AK
Rogers, JA
Nuzzo, RG
机构
[1] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Dept Chem, Urbana, IL 61801 USA
[3] Univ Illinois, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA
[4] Univ Illinois, Dept Chem, Urbana, IL 61801 USA
[5] Dow Corning Corp, Midland, MI 48686 USA
关键词
D O I
10.1002/adma.200500578
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The selective transfer and accurate registration of microstructured silicon (mu s-Si) across large areas is demonstrated using a printing-based procedure applicable to both rigid (i.e., glass) and flexible plastic substrates (see Figure). The utility of this technique to construct macroelectronic systems that incorporate high-performance mu s-Si thin-film transistors on flexible substrates is also demonstrated.
引用
收藏
页码:2332 / +
页数:6
相关论文
共 20 条
[1]  
[Anonymous], UNPUB
[2]  
Burns S. E., 2003, Journal of the Society for Information Display, V11, P599, DOI 10.1889/1.1825687
[3]  
CHILDS WR, 2005, LANGMUIR, DOI DOI 10.1021/LA50011B
[4]   Stability of molded polydimethylsiloxane microstructures [J].
Delamarche, E ;
Schmid, H ;
Michel, B ;
Biebuyck, H .
ADVANCED MATERIALS, 1997, 9 (09) :741-746
[5]   High-performance thin-film transistors using semiconductor nanowires and nanoribbons [J].
Duan, XF ;
Niu, CM ;
Sahi, V ;
Chen, J ;
Parce, JW ;
Empedocles, S ;
Goldman, JL .
NATURE, 2003, 425 (6955) :274-278
[6]   ALL-POLYMER FIELD-EFFECT TRANSISTOR REALIZED BY PRINTING TECHNIQUES [J].
GARNIER, F ;
HAJLAOUI, R ;
YASSAR, A ;
SRIVASTAVA, P .
SCIENCE, 1994, 265 (5179) :1684-1686
[7]   Analog and digital circuits using organic thin-film transistors on polyester substrates [J].
Kane, MG ;
Campi, J ;
Hammond, MS ;
Cuomo, FP ;
Greening, B ;
Sheraw, CD ;
Nichols, JA ;
Gundlach, DJ ;
Huang, JR ;
Kuo, CC ;
Jia, L ;
Klauk, H ;
Jackson, TN .
IEEE ELECTRON DEVICE LETTERS, 2000, 21 (11) :534-536
[8]   INVENTION OF INTEGRATED-CIRCUIT [J].
KILBY, JS .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1976, 23 (07) :648-654
[9]   Thin film transistors for displays on plastic substrates [J].
Lee, MJ ;
Judge, CP ;
Wright, SW .
SOLID-STATE ELECTRONICS, 2000, 44 (08) :1431-1434
[10]   A printable form of silicon for high performance thin film transistors on plastic substrates [J].
Menard, E ;
Lee, KJ ;
Khang, DY ;
Nuzzo, RG ;
Rogers, JA .
APPLIED PHYSICS LETTERS, 2004, 84 (26) :5398-5400