Progress in upgrading a long trace profiler at NSRRC

被引：2
|
作者：
Wang, Duan-Jen [1 ]
Lin, Shang-Wei [1 ]
Perng, Shen-Yaw [1 ]
机构：
[1] NSRRC, 101 Shin Ann Rd,Hsinchu Sci Pk, Hsinchu 30076, Taiwan
来源：
8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: SUBNANOMETER ACCURACY MEASUREMENT FOR SYNCHROTRON OPTICS AND X-RAY OPTICS | 2016年 / 9687卷
关键词：
Long trace profiler; mirror measurement;
D O I：
10.1117/12.2247664
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A long trace profiler in NSRRC is used to develop a bendable mirror, for the mirror- mounting mechanism and to inspect the mirrors of TPS beamlines. We upgraded the air bearing, the motor and gear, the penta- mirror, the CCD and the software. ELCOMATT 3000 is our calibration reference. To maintain constant the measurement of the optical path, we adopted a scheme for a moving optical head that decreases the various optical paths through a focusing lens to avoid lens homogeneity. The measurement environment (temperature, vibration, air turbulence) is effectively controlled. In measuring a curved mirror (radius 9.7 m), the repeatability is below 0.1 mu rad. This paper describes the upgraded performance and engineering details.
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页数：7
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