Multi Stage Noise Shaping Sigma-delta Modulator (MASH) for Capacitive MEMS Accelerometers

被引：2
|
作者：
Almutairi, Bader [1 ]
Kraft, Michael [1 ]
机构：
[1] Univ Southampton, ECS, Southampton SO14 1BJ, Hants, England
来源：
EUROSENSORS XXV | 2011年 / 25卷
关键词：
Sigma-delta Modulator; Multi Stage Noise Shaping; MASH; MEMS accelerometer;
D O I：
10.1016/j.proeng.2011.12.324
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Electromechanical multi stage noise shaping sigma-delta modulator (MASH) has the advantages of inherent stability, high dynamic range, and high overload input level compared with the single loop sigma-delta-modulator approach. In this paper, a fourth order electromechanical MASH is studied by Simulink modeling and hardware implementation using surface mount PCB technology. The accelerometer used in the study is fabricated using a Silicon on Insulator (SOI) wafer with a device layer thickness of 50um, using a dicing free and dry release process. The experimental results confirm the concept of the MASH structure and show its potential as a closed loop interface concept for a high performance capacitive MEMS accelerometer. (C) 2011 Published by Elsevier Ltd.
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页数：4
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