Indium oxide, tin oxide and indium tin oxide nanostructure growth by vapor deposition

被引：10

作者：

Fung, M. K. ^{[1
]}

Wong, K. K. ^{[1
]}

Chen, X. Y. ^{[1
]}

Chan, Y. F. ^{[3
]}

Ng, A. M. C. ^{[1
,2
]}

Djurisic, A. B. ^{[1
]}

Chan, W. K. ^{[4
]}

机构：

[1] Univ Hong Kong, Dept Phys, Hong Kong, Hong Kong, Peoples R China

[2] S Univ Sci & Technol China, Nanostruct Inst Energy & Environm Res, Div Phys Sci, Shenzhen, Peoples R China

[3] Univ Hong Kong, Electron Microscopy Unit, Hong Kong, Hong Kong, Peoples R China

[4] Univ Hong Kong, Dept Chem, Hong Kong, Hong Kong, Peoples R China

来源：

CURRENT APPLIED PHYSICS | 2012年 / 12卷 / 03期

关键词：

Metal oxide; Nanowires; ITO; NANOWIRE; PHOTOLUMINESCENCE; CATALYST; ARRAYS; GA;

D O I：

10.1016/j.cap.2011.10.006

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Indium oxide, tin oxide and indium tin oxide nanowires have been grown by vapor deposition on Si and quartz substrates. Under the growth conditions used, pure SiOx nanowires, a mixture of SiOx and indium oxide, tin oxide or indium tin oxide nanostructures, or pure indium oxide, tin oxide or indium tin oxide nanostructures could be obtained at different substrate temperatures. The growth mechanism of the obtained nanostructures at different substrate temperatures is discussed. Optical and electrical properties of the deposited pure indium oxide, tin oxide or indium tin oxide nanostructures have been measured, and low sheet resistances on quartz substrates have been obtained for indium oxide and indium tin oxide nanostructures. (C) 2011 Elsevier B. V. All rights reserved.

引用

页码：697 / 706

页数：10

共 50 条

[21] Thermoelectric properties and thermal tolerance of indium tin oxide nanowires [J].

Hernandez, Jose A. ;

Carpena-Nunez, Jennifer ;

Fonseca, Luis F. ;

Pettes, Michael Thompson ;

Yacaman, Miguel Jose ;

Benitez, Alfredo .

NANOTECHNOLOGY, 2018, 29 (36)

[22] Low temperature deposition of indium tin oxide (ITO) films on plastic substrates [J].

Singh, V ;

Saswat, B ;

Kumar, S .

Materials, Integration and Technology for Monolithic Instruments, 2005, 869 :139-144

[23] Fabrication and characterization of an indium tin oxide acoustoelectric hydrophone [J].

Ingram, Pier ;

Greenlee, Charles L. ;

Wang, Zhaohui ;

Olafsson, Ragnar ;

Norwood, Robert A. ;

Witte, Russell S. .

MEDICAL IMAGING 2010: ULTRASONIC IMAGING, TOMOGRAPHY, AND THERAPY, 2010, 7629

[24] Thin film Indium Tin Oxide acetone sensor [J].

Pandya, H. J. .

INTERNATIONAL JOURNAL OF SIGNAL AND IMAGING SYSTEMS ENGINEERING, 2009, 2 (1-2) :66-69

[25] A sustainable approach to separate and recover indium and tin from spent indium-tin oxide targets [J].

Gu, Shuai ;

Fu, Bitian ;

Dodbiba, Gjergj ;

Fujita, Toyohisa ;

Fang, Baizeng .

RSC ADVANCES, 2017, 7 (82) :52017-52023

[26] Indium tin oxide on copper phthalocyanine - an ellipsometry study [J].

Friedrich, Marion ;

Kupfer, Hartmut ;

Zahn, Dietrich R. T. .

PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7, NO 2, 2010, 7 (02) :304-307

[27] GaN photodetectors with transparent indium tin oxide electrodes [J].

Chiou, YZ ;

Tang, JJ .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (7A) :4146-4149

[28] Reactive magnetron sputtering of indium tin oxide on acrylics [J].

Huang, JL ;

Yau, BS ;

Lin, SS ;

Lii, DF .

EURO CERAMICS VII, PT 1-3, 2002, 206-2 :507-510

[29] Synthesis and Characterisation of Polygonal Indium Tin Oxide Nanocrystals [J].

Koo, Bon-Ryul ;

Park, Byung Kyu ;

Kim, Chang Yeoul ;

Oh, Sung-Tag ;

Ahn, Hyo-Jin .

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2013, 13 (11) :7590-7595

[30] The development of an inspection system for indium tin oxide circuits [J].

Chan, Chih-Hsiang ;

Zou, Yong-Tong ;

Liu, Ting-Kun ;

Wang, Hau-Wei ;

Lin, Shih-Chieh .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2012, 23 (08)

← 1 2 3 4 5 →