Spontaneous Formation of AlInN Core-Shell Nanorod Arrays by Ultrahigh-Vacuum Magnetron Sputter Epitaxy

被引：16

作者：

Hsiao, Ching-Lien ^{[1
]}

Palisaitis, Justinas ^{[1
]}

Junaid, Muhammad ^{[1
]}

Chen, Ruei-San ^{[1
]}

Persson, Per O. A. ^{[1
]}

Sandstrom, Per ^{[1
]}

Holtz, Per-Olof ^{[1
]}

Hultman, Lars ^{[1
]}

Birch, Jens ^{[1
]}

机构：

[1] Linkoping Univ, Dept Phys Chem & Biol IFM, SE-58183 Linkoping, Sweden

来源：

APPLIED PHYSICS EXPRESS | 2011年 / 4卷 / 11期

关键词：

GROWTH; GAN;

D O I：

10.1143/APEX.4.115002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The spontaneous formation of AlInN core-shell nanorod arrays with variable In concentration has been realized by ultrahigh-vacuum magnetron sputter epitaxy with Ti0.21Zr0.79N or VN seed layer assistance. The nanorods exhibit hexagonal cross sections with preferential growth along the c-axis. A core-shell rod structure with a higher In concentration in the core was observed by (scanning) transmission electron microscopy in combination with low-loss electron energy loss spectroscopy and energy dispersive X-ray spectroscopy. 5 K cathodoluminescence spectroscopy of Al0.86In0.14N nanorods revealed band edge emission at similar to 5.46 eV, which was accompanied by a strong defect-related emission at similar to 3.38 eV. (C) 2011 The Japan Society of Applied Physics

引用

页数：3

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