Morphology of Titanium Nanocluster Films Prepared by Gas Aggregation Cluster Source

被引：39

作者：

Drabik, Martin ^{[1
]}

Choukourov, Andrei ^{[1
]}

Artemenko, Anna ^{[1
]}

Kousal, Jaroslav ^{[1
]}

Polonskyi, Oleksandr ^{[1
]}

Solar, Pavel ^{[1
]}

Kylian, Ondrej ^{[1
]}

Matousek, Jindrich ^{[1
]}

Pesicka, Josef ^{[1
]}

Matolinova, Iva ^{[1
]}

Slavinska, Danka ^{[1
]}

Biederman, Hynek ^{[1
]}

机构：

[1] Charles Univ Prague, Fac Math & Phys, CR-18000 Prague 8, Czech Republic

来源：

PLASMA PROCESSES AND POLYMERS | 2011年 / 8卷 / 07期

关键词：

ageing; gas aggregation cluster source; morphology; nanocluster; TiO(2); ORGANIC SOLAR-CELLS; BEAM DEPOSITION; TIO2; CONDENSATION;

D O I：

10.1002/ppap.201000126

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Titanium nanocluster films were prepared using a gas aggregation cluster source based on a planar magnetron following a Haberland concept and using Ar as a working gas. The films were deposited in dependence on the argon pressure inside the cluster source and on the magnetron current. Prior to the analysis, deposited metal nanocluster films were allowed to oxidize in air at room temperature. Selected nanocluster films were annealed in air at 420 degrees C. The films were studied by TEM, SEM, and AFM in order to describe their morphology and topography. Crystal structure of the nanoclusters was estimated from electron diffraction patterns by SAD analysis. Chemical composition of the film surface was determined by XPS. Special attention was paid to describing the changes in the nanocluster films connected with ageing.

引用

页码：640 / 650

页数：11

共 26 条

[1]

[Anonymous], POWD DIFFR FIL

[2] Supersonic cluster beam deposition of nanostructured titania [J].