IMPROVED PEFORMANCE OF MICRO-PRECONCENTRATOR USING MESOPOROUS SILICA WITH HIGH SPECIFIC SURFACE AREA AS A SURFACE TEMPLATE

被引：0
作者：
Zhao, Bin [1 ]
Feng, Fei [1 ,2 ]
Luo, Fan [1 ]
Yang, Xuelei [1 ]
Zhou, Haimei [1 ]
Li, Xinxin [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
来源：
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2019年
基金：
国家高技术研究发展计划(863计划); 中国国家自然科学基金; 国家重点研发计划;
关键词：
D O I：
10.1109/memsys.2019.8870750
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, mesoporous silica (MS) with high specific surface area was used as a surface template to improve the enrichment performance of micro-preconcentrator (mu mu PC) of the volatile organic compounds (VOCs). The mu mu PC was fabricated based on MEMS technology. The MS layer was deposited on the surface of the cavity of the mu PC, and then the Tenax-TA was coated on the surface of the MS layer. The enrichment performances of the VOCs of the mu PC with Tenax-TA and Tenax-TA using the MS layer as a surface template (MS + Tenax-TA) were respectively measured. The enrichment ratio of butyl acetate of the mu PC with Tenax-TA was 3.08, and the mu PC with MS + Tenax-TA was as high as 573, which has a 185 times enhancement, suggesting that the MS layer as the surface template of Tenax-TA effectively enhanced the enrichment performance of the VOCs.
引用
收藏
页码：472 / 475
页数：4
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