A compact low-loss KA-band filter using 3-dimensional micromachined integrated coax

被引：34

作者：

Chen, RT ^{[1
]}

Brown, ER ^{[1
]}

Bang, CA ^{[1
]}

机构：

[1] Microfabrica Inc, Burbank, CA 91506 USA

来源：

MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2004年

关键词：

D O I：

10.1109/MEMS.2004.1290706

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel low-loss (1.74dB) 3-pole Butterworth distributed filter operating in the Ka-band with a center frequency of 29GHz. The filter has a compact 6mm square footprint and is designed using 3-dimensional (31)) micromachined integrated coax. The integrated coax transmission lines are made of forty-one nickel layers and fabricated using a selective electrochemical metal deposition process (EFAB(TM)). Full-wave simulations of the filter using Ansoft HFSS show very good agreement on insertion loss compared with measured results. Using the EFAB(TM), we have been able to produce low-loss, all-metal, completely shielded transmission lines with small bend radii and no inter-line coupling.

引用

页码：801 / 804

页数：4

共 6 条

[1] DC-725 GHZ SAMPLING CIRCUITS AND SUBPICOSECOND NONLINEAR TRANSMISSION-LINES USING ELEVATED COPLANAR WAVE-GUIDE [J].