The combined use of wrinkling and cracking for the characterization of the mechanical properties of the laser-fabricated nanometer-thick amorphous carbon films

被引:6
作者
Chen, Zhepeng [1 ]
Luo, Jiangjiang [1 ]
Liu, Aishuang [1 ]
Xu, Chang [1 ]
Gao, Fan [1 ]
Yao, Yanbo [1 ]
Liu, Tao [1 ]
机构
[1] Soochow Univ, Coll Chem Chem Engn & Mat Sci, Suzhou 215123, Peoples R China
基金
中国国家自然科学基金;
关键词
Wrinkling; Cracking; Laser-fabrication; Amorphous carbon films; Mechanical properties; FRACTURE-TOUGHNESS; ELASTIC-MODULUS; NANOINDENTATION; SUBSTRATE; METROLOGY; STIFFNESS; HARDNESS;
D O I
10.1016/j.carbon.2021.09.003
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Direct laser writing carbonization has been recently developed to enable facile fabrication of patternable nanometer-thick two-dimensional amorphous carbon films, which may find promising applications in high-performance sensing, energy storage, catalysis, biomaterials etc. Given its nanometer-thick character and brittleness in nature, it is quite challenging to evaluate and characterize the mechanical properties of this novel material. With assistance of a sacrificial-layer transfer approach for sample preparation, herein, we rely on wrinkling metrology as a viable tool for characterizing the elastic modulus of the laser-fabricated nanometer thick amorphous carbon films. Moreover, upon combining the wrinkling metrology with channel cracking behavior investigation, the strength-related mechanical properties, including fracture toughness, fracture strength and fracture strain of the carbon thin films of varied thickness have been evaluated comprehensively. Within the experimental conditions being studied, the elastic modulus, fracture toughness, fracture strength and fracture strain of the laser-fabricated nanometer-thick carbon films respectively fall in a range of 23.1-34.9 GPa, 16.3-151.7 J/m(2), 0.5-1.4 GPa, and 2.0-4.5%. The results and methodology presented in this study demonstrate the usefulness of combining wrinkling metrology and cracking technique as a simple but generally applicable approach for comprehensive characterization and evaluation of the mechanical properties of different types of brittle and nanometer-thick thin films. (C) 2021 Elsevier Ltd. All rights reserved.
引用
收藏
页码:864 / 874
页数:11
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