Folded MEMS Pyramid Inertial Measurement Unit

被引：30

作者：

Zotov, Sergei A. ^{[1
]}

Rivers, Montgomery C. ^{[1
]}

Trusov, Alexander A. ^{[1
]}

Shkel, Andrei M. ^{[1
]}

机构：

[1] Univ Calif Irvine, Irvine, CA 92697 USA

来源：

IEEE SENSORS JOURNAL | 2011年 / 11卷 / 11期

关键词：

Inertial measurement unit (IMU); inertial sensors; microelectromechanical systems (MEMS); micromachined accelerometer; micromachined gyroscopes; 3-D MEMS;

D O I：

10.1109/JSEN.2011.2160719

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a new approach for design and fabrication of chip-level inertial measurement units (IMUs). The method utilizes a 3-D foldable silicon-on-insulator (SOI) backbone with in-situ fabricated high-aspect-ratio sensors. A planar multi-sensor unit was fabricated and subsequently folded in a pyramidal shape, forming a compact IMU. Inertial characterization of the sensors integrated on the IMU pyramid was performed at atmospheric pressure. Structural rigidity and sensor axis alignment stability of the folded IMUs have been characterized under various environmental conditions, including vibration, thermal loading, thermal shock, and constant acceleration. The maximum angular misalignment due to variation in environmental conditions between IMU pyramid sidewalls was shown to be less than 4 and 0.2 mrad for epoxy and solder reinforced structures, respectively. Vibration testing revealed no resonances up to 10 kHz in the assembled 3-D structures. Our results confirm feasibility of the fabrication approach.

引用

页码：2780 / 2789

页数：10

共 19 条

[1]

Brown A., 2004, P I NAVIGATION GPS, P825

[2] An integrated MEMS inertial measurement unit [J].

Cardarelli, D .

2002 IEEE POSITION LOCATION AND NAVIGATION SYMPOSIUM, 2002, :314-319

[3] Telemetry systems and electric gun projectiles [J].

D'Amico, WP .

IEEE TRANSACTIONS ON MAGNETICS, 2001, 37 (01) :343-346

[4]

Geiger W, 2008, IEEE POSITION LOCAT, P82

[5]

Grewal M.S., 2001, GLOBAL POSITION SYST

[6]

Groves PD, 2008, ARTECH HSE GNSS TECH, P3

[7]

Habibi Soheil, 2008, 2008 IEEE/ION Position, Location and Navigation Symposium - PLANS 2008, P232, DOI 10.1109/PLANS.2008.4569974

[8]

Hopkins R., 2005, Proceed- ings of the Institute of Navigation, National Technical Meeting, P970

[9]

Kranz M. S., 1997, P S GYR TECHN SEP, P30

[10] The development of micro-gyroscope technology [J].

Liu, Kai ;

Zhang, Weiping ;

Chen, Wenyuan ;

Li, Kai ;

Dai, Fuyan ;

Cui, Feng ;

Wu, Xiaosheng ;

Ma, Gaoyin ;

Xiao, Qijun .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (11)

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