Preparation and properties of highly oriented LaNiO3 thin films on different substrates

被引：2
|
作者：
Yang, Xian [1 ]
Wu, Xiaoqing [1 ]
Ren, Wei [1 ]
Shi, Peng [1 ]
Yan, Xin [1 ]
Lei, Hongsheng [1 ]
Yao, Xi [1 ]
机构：
[1] Xi An Jiao Tong Univ, Elect Mat Res Lab, Xian 710049, Peoples R China
来源：
FERROELECTRICS | 2007年 / 357卷
关键词：
LaNiO3; pseudo-cubic perovskite structure; orientation growth; thin films;
D O I：
10.1080/00150190701527878
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Highly (100) and (110) oriented LaNiO3 (LNO) thin films were prepared on various substrates, including Si (100), Si (111), SiO2/Si, Si3N4/Si by a metal-organic decomposition (MOD) method. Two different thermal processes were employed to crystallize LNO films. XRD analysis showed different thermal processes led to different preferential orientations of LNO films. The orientation dependence of LNO films on annealing process has been investigated. FESEM and AFM images show LNO films are uniform and crack-free. Low resistivity and high infrared absorbability make LNO thin film a promising electrode and infrared absorbed material for IR detector applications.
引用
收藏
页码：53 / 57
页数：5
相关论文
共 50 条
  • [1] Preparation of highly oriented LaNiO3 thin films by spin-coating technique
    Hwang, KS
    Kim, BH
    JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1999, 14 (02) : 203 - 207
  • [2] Preparation of Highly Oriented LaNiO3 Thin Films by Spin-Coating Technique
    Kyu-Seog Hwang
    Byung-Hoon Kim
    Journal of Sol-Gel Science and Technology, 1999, 14 : 203 - 207
  • [3] Preparation and microstructure of highly - Oriented LaNiO3 thin films by RF sputtering method
    Cheng, Xing-Hua
    Qiao, Liang
    Bi, Xiao-Fang
    Chinese Journal of Aeronautics, 2006, 19 (SUPPL.):
  • [4] Preparation and Microstructure of Highly-Oriented LaNiO3 Thin Films by RF Sputtering Method
    CHENG Xing-hua
    Chinese Journal of Aeronautics , 2006, (S1) : 142 - 145
  • [5] Fabrication and conductive characteristic of highly oriented LaNiO3 thin films
    Hu, Wencheng
    Yang, Chuanren
    Zhang Wanli
    Dong, Dong
    Liu, Guijun
    INTEGRATED FERROELECTRICS, 2007, 91 : 73 - 79
  • [6] Deposition and properties of highly (100)-oriented barium titanate thin films on LaNiO3 electrode
    Wu, TB
    Shy, HJ
    CERAMICS INTERNATIONAL, 2000, 26 (06) : 599 - 603
  • [7] Preparation of highly (100)-oriented metallic LaNiO3 films on Si substrates by a modified metalorganic decomposition technique
    Meng, XJ
    Sun, JL
    Yu, J
    Ye, HJ
    Guo, SL
    Chu, JH
    APPLIED SURFACE SCIENCE, 2001, 171 (1-2) : 68 - 70
  • [8] Growth of (100)-oriented LaNiO3 thin films directly on Si substrates by a simple metalorganic decomposition technique for the highly oriented PZT thin films
    Meng, XJ
    Cheng, JG
    Sun, JL
    Ye, HJ
    Guo, SL
    Chu, JH
    JOURNAL OF CRYSTAL GROWTH, 2000, 220 (1-2) : 100 - 104
  • [9] (001)-oriented LaNiO3 bottom electrodes and (001)-textured ferroelectric thin films on LaNiO3
    Zhang, ZS
    Park, JH
    Trolier-McKinstry, S
    FERROELECTRIC THIN FILMS VIII, 2000, 596 : 73 - 78
  • [10] Preparation of (100)- and (110)-oriented LaNiO3 thin films by chemical solution deposition
    Wang, Pilong
    Wu, Weibing
    Hu, Guangda
    Fan, Suhua
    Ding, Yanxia
    Wu, Haitao
    SURFACE REVIEW AND LETTERS, 2007, 14 (01) : 123 - 128
12345