共 50 条
- [41] Optimization of secondary ion mass spectrometry ultra-shallow boron profiles using an oblique incidence O2+ beam JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (01): : 336 - 340
- [43] Experimental study on submicron focused ion beam etching fabrication Weixi Jiagong Jishu, 2 (26-34):
- [44] MASKLESS ETCHING OF AL USING FOCUSED ION-BEAM JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (07): : L526 - L529
- [45] Fabrication of photonic crystal structures by Focused Ion Beam etching ICTON 2004: 6TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS, PROCEEDINGS, VOL 2, 2004, : 135 - 138
- [48] PARAMETRIC MODELING OF FOCUSED ION-BEAM INDUCED ETCHING JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 1814 - 1819
- [49] Preparation of magnonic crystals with nanoislands by focused ion beam etching Inorganic Materials, 2012, 48 : 1190 - 1192