Nanomanipulator-assisted fabrication and characterization of carbon nanotubes inside scanning electron microscope

被引：27
|
作者：
Lim, SC
Kim, KS
Lee, IB
Jeong, SY
Cho, S
Yoo, JE
Lee, YH [1 ]
机构：
[1] Sungkyunkwan Univ, Dept Phys, Inst Basic Sci, Ctr Nanotubes & Nanostruct Composites, Suwon 440746, South Korea
[2] Sungkyunkwan Univ, Dept Chem Engn, Ctr Nanotubes & Nanostruct Composites, Suwon 440746, South Korea
[3] Iljin Nanotech Co Ltd, Seoul 157810, South Korea
来源：
MICRON | 2005年 / 36卷 / 05期
关键词：
carbon nanotubes; scanning electron microscope; nanomanipulator; in situ characterization;
D O I：
10.1016/j.micron.2005.03.005
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
We have installed two nanomanipulators, which can travel about 20 mm with a minimum increment of 1 nm, for manipulation of nanostructured materials inside field-emission scanning electron microscope (FE-SEM). Both manipulators render motions in x, y, and z directions, providing various manipulation freedoms such as moving, bending, cutting, and biasing. In addition, we have conducted in situ characterization of the electrical breakdown of multi-walled carbon nanotubes (MWCNTs). Our results demonstrate the possibility that MWCNTs can be used as a gas sensor. (c) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码：471 / 476
页数：6
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