Effect of Deposition Pressure, Nitrogen Content and Substrate Temperature on Optical and Mechanical Behavior of Nanocomposite Al-Si-N Hard Coatings for Solar Thermal Applications

被引：12

作者：

Soni ^{[1
,2
]}

Kumari, Swati ^{[1
]}

Sharma, S. K. ^{[2
]}

Mishra, S. K. ^{[1
]}

机构：

[1] CSIR Natl Met Lab, Jamshedpur 831007, Bihar, India

[2] Indian Inst Technol ISM, Dhanbad 826004, Jharkhand, India

来源：

JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE | 2018年 / 27卷 / 12期

关键词：

mechanical behavior; nanocomposite hard coatings; optical coating; THIN-FILMS; MICROSTRUCTURE;

D O I：

10.1007/s11665-018-3730-y

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Hard and optically transparent nanocomposite Al-Si-N thin films were deposited using DC magnetron sputtering at different process parameters. There was a significant effect of these parameters on the film properties affecting its mechanical and optical behavior. The nitrogen content or pressure, deposition pressure and substrate temperature strongly influence the phase formation which governs the hardness and optical transparency of the coating. Hardness was measured between 18 and 30GPa. The band gap could be varied in the range of 3.8-4.2eV by varying nitrogen pressures in the chamber during deposition. The films showed (0-80)% transparency in UV and visible region depending on the sputtering conditions.

引用

页码：6729 / 6736

页数：8

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