Effect of Different Substrates on the Wettability and Electrical Properties of Au Thin Films Deposited by Sputtering

被引:5
|
作者
Dhar, Aritra [1 ,2 ]
Zhao, Zhao [2 ]
Alford, T. L. [1 ,2 ]
机构
[1] Arizona State Univ, Dept Chem & Biochem, Tempe, AZ 85287 USA
[2] Arizona State Univ, Sch Engn Matter Transport & Energy, Tempe, AZ 85287 USA
基金
美国国家科学基金会;
关键词
TRANSISTORS; POLYMER; SILVER;
D O I
10.1007/s11837-015-1347-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The compatibility of gold with underlying substrate materials is important for device performance and reliability. Gold nanolayers of various thicknesses (4-14 nm) are deposited onto different substrates (glass and flexible substrate) by sputtering at room temperature. The flexible substrate used in the study was polyethylene napthalate (PEN). The structural and electrical properties of the Au thin films are compared between the two substrates. Contact angle measurements are done to understand the wettability of Au thin films on various substrates. The Au film on PEN showed hydrophobic behavior while the films on glass were distinctly hydrophilic with contact angle of around 50-68.5A degrees against water. The poor wettability is associated with increased roughness of the PEN substrate.
引用
收藏
页码:845 / 848
页数:4
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