The High-Performance Imaging Verification of Si:P Blocked Impurity Band Detector for Very-Long-Wave-Infrared Spectral Range

被引:19
作者
Chen, Yulu [1 ]
Wang, Bingbing [2 ,3 ]
Zang, Yuanzhang [1 ]
Zhang, Chuansheng [1 ]
Zhang, Haoxing [1 ]
Yuan, Yi [1 ]
Zhou, Deliang [1 ]
Hou, Liwei [1 ]
Pan, Ming [1 ]
Wang, Xiaodong [1 ]
机构
[1] China Elect Technol Grp Corp, Res Inst 50, Shanghai 200331, Peoples R China
[2] Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
基金
中国国家自然科学基金; 上海市自然科学基金;
关键词
Detectors; Absorption; Imaging; Impurities; Silicon; Doping; Conductivity; Photodetectors; silicon-based blocked-impurity-band detector; optical imaging; VLWIR;
D O I
10.1109/JQE.2020.2976565
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Very-long-wave-infrared (VLWIR) photodetectors have attracted great attention from scientists worldwide in the ground and space-based detections, imaging and early warning. However, the application of VLWIR photodetectors on earth is limited by the difficulty of establishing a high spatial-resolution fine imaging system with high-performance detector and large size optical lens. In this work, the VLWIR Si-based blocked-impurity-band (BIB) detector is fabricated and its highperformance imaging system is constructed. The CVD growth progress is optimized by enhancing the doping concentration of absorption layer, and shortening the transition length between blocking and absorption layers. At the temperature of 4.2K, the blackbody responsivity of Si-based BIB detector reaches 20.78A/W and the Noise Equivalent Power is 8.7x10-16W/Hz1/2 at 2.6V. Based on the high performance Si-based BIB detector, an imaging verifying system is set up to detect different roomtemperature objects. Its spatial and temperature resolution reaches 250 mu m and 10mK, respectively. Our results indicate that with suitable optical imaging system, the BIB detector is more effective than the infrared detector of commercial thermal infrared imager in detecting room temperature or low temperature objects like metal. Our work is helpful for the further research on the large scale array integrated BIB imaging and detection system used on earth for explosives detection, biological nondestructive detection as well as security check.
引用
收藏
页数:6
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