Atmospheric Pressure Cold Argon/Oxygen Plasma Jet Assisted by Preionization of Syringe Needle Electrode

被引:17
作者
Qian Muyang [1 ]
Ren Chunsheng [1 ]
Wang Dezhen [1 ]
Feng Yan [1 ]
Zhang Jialiang [1 ]
机构
[1] Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116023, Peoples R China
基金
中国国家自然科学基金;
关键词
atmospheric pressure; nonequilibrium Ar/O-2 plasma; preionization; actinometry; concentration of atomic oxygen; heat transfer oil; OPTICAL-EMISSION; ENERGY TRANSFER; DISCHARGES; OXYGEN;
D O I
10.1088/1009-0630/12/5/11
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
An atmospheric pressure nonequilibrium argon/oxygen plasma jet assisted by the preionization of syringe needle electrode discharge is reported. With the syringe needle plasma as its pre-ionization source, the hybrid barrier-jet was shown to generate uniform discharge with a lower breakdown voltage and a relatively low gas temperature varying from 390 K to 440 K, even when the vol.% oxygen in argon was up to 6%. Utilizing the actinometry method, the concentration of atomic oxygen was estimated to be about in an orders of magnitude of 10(17) cm(-3). The argon/oxygen plasma jet was then employed to clean out heat transfer oil, with a maximum cleaning rate of 0.1 mm/s achieved.
引用
收藏
页码:561 / 565
页数:5
相关论文
共 18 条
[1]   Protein destruction by a helium atmospheric pressure glow discharge: Capability and mechanisms [J].
Deng, X. T. ;
Shi, J. J. ;
Kong, M. G. .
JOURNAL OF APPLIED PHYSICS, 2007, 101 (07)
[2]   STUDY OF OPTICAL EMISSION FROM AN RF PLASMA DURING SEMICONDUCTOR ETCHING [J].
HARSHBARGER, WR ;
PORTER, RA ;
MILLER, TA ;
NORTON, P .
APPLIED SPECTROSCOPY, 1977, 31 (03) :201-207
[3]   ELECTRONIC-ENERGY TRANSFER FROM METASTABLE ARGON (4S3P2,0) TO XENON, OXYGEN AND CHLORINE ATOMS [J].
KING, DL ;
PIPER, LG ;
SETSER, DW .
JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS II, 1977, 73 :177-200
[4]   Atmospheric Pressure Plasma Cleaning of Gold Flip Chip Bump for Ultrasonic Flip Chip Bonding [J].
Koo, J-M ;
Lee, J-B ;
Moon, Y. J. ;
Moon, W-C ;
Jung, S-B .
PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY, 2008, 100
[5]  
LABER RR, 1990, J PHYS CHEM REF DATA, V19, P277
[6]   NECESSARY CONDITIONS FOR THE HOMOGENEOUS FORMATION OF PULSED AVALANCHE DISCHARGES AT HIGH GAS-PRESSURES [J].
LEVATTER, JI ;
LIN, SC .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (01) :210-222
[7]   Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge [J].
Li, Shou-Zhe ;
Lim, Jin-Pyo ;
Kang, Jung G. ;
Uhm, Han S. .
PHYSICS OF PLASMAS, 2006, 13 (09)
[8]   Optical diagnosis of an argon/oxygen needle plasma generated at atmospheric pressure [J].
Li, Shou-Zhe ;
Huang, Wen-Tong ;
Zhang, Jialiang ;
Wang, Dezhen .
APPLIED PHYSICS LETTERS, 2009, 94 (11)
[9]   Influence of oxygen in atmospheric-pressure argon plasma jet on sterilization of Bacillus atrophaeous spores [J].
Lim, Jin-Pyo ;
Uhm, Han S. ;
Li, Shou-Zhe .
PHYSICS OF PLASMAS, 2007, 14 (09)
[10]   A radio-frequency nonequilibrium atmospheric pressure plasma operating with argon and oxygen [J].
Moravej, M. ;
Yang, X. ;
Hicks, R. F. ;
Penelon, J. ;
Babayan, S. E. .
JOURNAL OF APPLIED PHYSICS, 2006, 99 (09)