Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method

被引：173

作者：

Chen, Feng ^{[1
,2
]}

Liu, Hewei ^{[1
,2
]}

Yang, Qing ^{[3
]}

Wang, Xianhua ^{[1
,2
]}

Hou, Cong ^{[1
,2
]}

Bian, Hao ^{[1
,2
]}

Liang, Weiwei ^{[1
,2
]}

Si, Jinhai ^{[1
,2
]}

Hou, Xun ^{[1
,2
]}

机构：

[1] Xi An Jiao Tong Univ, Key Lab Phys Elect & Devices, Minist Educ, Xian 710049, Peoples R China

[2] Xi An Jiao Tong Univ, Shanxi Key Lab Informat Photon Tech, Sch Elect & Informat Engn, Xian 710049, Peoples R China

[3] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 19期

基金：

美国国家科学基金会;

关键词：

PHOTOLITHOGRAPHY; DIFFUSER; LENS;

D O I：

10.1364/OE.18.020334

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A simple and efficient technique for large-area manufacturing of concave microlens arrays (MLAs) on silica glasses with femtosecond (fs)-laser-enhanced chemical wet etching is demonstrated. By means of fs laser in situ irradiations followed by the hydrofluoric acid etching process, large area close-packed rectangular and hexagonal concave MLAs with diameters less than a hundred of micrometers are fabricated within a few hours. The fabricated MLAs exhibit excellent surface quality and uniformity. In contrast to the classic thermal reflow process, the presented technique is a maskless process and allows the flexible control of the size, shape and the packing pattern of the MLAs by adjusting the parameters such as the pulse energy, the number of shots and etching time. (C) 2010 Optical Society of America

引用

页码：20334 / 20343

页数：10

共 22 条

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