A low-parasitic collector construction for high-speed SiGe:C HBTs

被引：36

作者：

Heinemann, B ^{[1
]}

Barth, R ^{[1
]}

Bolze, D ^{[1
]}

Drews, J ^{[1
]}

Formanek, P ^{[1
]}

Grabolla, T ^{[1
]}

Haak, U ^{[1
]}

Höppner, W ^{[1
]}

Knoll, D ^{[1
]}

Köpke, K ^{[1
]}

Kuck, B ^{[1
]}

Kurps, R ^{[1
]}

Marschmeyer, S ^{[1
]}

Richter, HH ^{[1
]}

Rücker, H ^{[1
]}

Schley, P ^{[1
]}

Schmidt, D ^{[1
]}

Winkler, W ^{[1
]}

Wolansky, D ^{[1
]}

Wulf, HE ^{[1
]}

Yamamoto, Y ^{[1
]}

机构：

[1] IHP, D-15236 Frankfurt, Oder, Germany

来源：

IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2004, TECHNICAL DIGEST | 2004年

关键词：

D O I：

10.1109/IEDM.2004.1419123

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a new collector construction for high-speed SiGe:C HBTs that substantially reduces the parasitic base-collector capacitance by selectively underetching of the collector region. The impact of the collector module on RF performance is demonstrated in separate bipolar processes for npn and prip devices. A minimum gate delay of 3.2ps was achieved for CML ring oscillators with npn transistors featuring f(T)/ f(max) values of 300GHz/250GHz at BVCEO = 1.8V. For pnp devices with f(T)/ f(max) values of 135GHz /140GHz at BVCEO = 2.5V a gate delay of 5.9ps is demonstrated. Further vertical scaling of the doping profiles increases f(T) to 380GHz at BVCEO = 1.5V for npn's and 155GHz at BVCEO = 2.3V for pnp's, but ring oscillator speed and f(max), degraded.

引用

页码：251 / 254

页数：4

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