High-Q microresonator characterization by optical frequency domain reflectometry

被引:0
|
作者
Zhang, Xiaopei [1 ,2 ]
Chen, Ze [1 ,2 ]
Yin, Xiaojie [3 ,4 ]
Liu, Xiaoping [1 ,2 ]
Lv, Haibin [1 ,2 ]
Wen, Yongqiang [5 ]
Zhang, Xiaolei [5 ]
机构
[1] Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China
[2] Nanjing Univ, Coll Engn & Appl Sci, Nanjing 210093, Peoples R China
[3] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
[4] Shijia Photons Technol, Hebi, Henan, Peoples R China
[5] Wuhan Megasense Technol Co Ltd, Wuhan 430000, Hubei, Peoples R China
来源
INTERNATIONAL CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC TECHNOLOGY AND APPLICATION | 2020年 / 11617卷
关键词
Optical frequency domain reflectometry; High-Q microresonator; Integrated optics devices; Optical metrology; Coherent communications; FIBER;
D O I
10.1117/12.2585171
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate a novel approach to characterize the microresonators using optical frequency domain reflectometry (OFDR). We analyzed the microresonators in both the spatial and spectral domains by a modified OFDR, which can reach a sensitivity of -130dB. We also provide a model to extract the free spectral range (FSR) of a microresonator from the backscattered signal. We fabricated three silica microresonators with different coupling conditions. The transmission differences between these samples can be shown clearly in the distributed loss curves. The power attenuation factor and the relative coupling strength of the microresonator can be derived from the OFDR data.
引用
收藏
页数:5
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